Furnace structure & Vacuum Chamber
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- Furnace, two temperature controllers, two channel gas flow meters are integrated into a mobile aluminum alloy frame
- The chamber is made of high purity fused quartz tube
- Quartz tube size: 11" OD/10.8" ID x 9" H
- The vacuum flanges are made of Stainless Steel 316
- Overall dimension: 850(L)×745(W)×1615(H) mm
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Vacuum Flanges |
- Top Flange with one KFD-25 vacuum port and two gas outlets (1/4" pipe required) can slide up or down manually to load and unload substrate and evaporated material easily
- Bottom flange has one KFD-25 vacuum port with right-angle valve and two gas inlets (1/4" pipe required) with needle valves
- Flange is sealed by double silicone o-rings and can achieve max. vacuum pressure of 10E-2 Torr by a quality mechanical pump and 10E-5 Torr by molecular pump (vacuum pump is not included, please order separately)
- One digital vacuum gauge is installed on the top flange
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Gas Flow Meters
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Two float-meters are installed on the control panel with measurement range of:
- 16 -160 mL/m
- 400 - 4000 mL/m (for purging purpose)
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Heater and Sample Holder
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- Two shortwave IR lamps as heating elements
- The distance between two heaters is adjustable from 10 - 50 mm
- The heaters are installed in the water cold jacket to reduce heat radiation and allow for fast cooling
- Water cold jacket is made of SS316 with PTFE fitting
- 3" round wafer holder is built in with top heater to load substrate
- One high thermal conductive AlN plate (3"Dia x 0.5mm Thick) is included, which shall put on the back of substrate to make it heated uniformly
- One 3" graphite crucible can be put on the bottom heater to load evaporating materials
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Temperature Controller |
- Two precision digital temperature controllers with 30 segments programmable offer independent controlling of top and bottom heaters
- Each controller has PID auto tune function to protect heaters from overshooting and alarm function to avoid overheating and thermal couple broken
- PC communication interface & software is installed for (click picture below for details) recording temperature profile shown as below
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Working Temperature |
- Max. temperature for each heaters: <= 650ºC
- Max. temperature difference between two heaters: <= 300ºC depends on spacing between two heaters:
- Spacing 30mm Max. temp difference: 315ºC @ heating bottom only
- Spacing 40mm Max. temp difference: 350ºC @ heating bottom only
- Spacing 50mm Max. temp difference: 395ºC @ heating bottom only
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| Heating & Cooling Rate |
- Heating: > 8ºC/s ( heating single heater only )
- Cooling: > 10ºC/s (600 - 100ºC) Max.
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| Thermal Couple |
Two K-type thermal couples are installed on top and bottom heaters separately |
| Working Voltage |
208 - 240VAC, single phase, 20A air breaker |
| Power Requirement |
2200W total ( 1100W for each heater ) |
Optional |
- One vacuum pump is required. Please order separately by click the first picture from the left below. Vacuum level can reach < = 10E-2 torr by mechanical pump
- If you run corrosive gas, please consider to use anti-corrosive dry pump is shown in the second picture from the left below (EQ-DP250) at extra cost
- You may order a recirculating water chiller for saving water source separately
- You may choose digital MFC gas deliver system by click the first picture from the right below
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| Warranty |
One year limited with life time support ( Consumable parts such as quartz tube and heating lamps are not covered by the warranty) |
| Compliance |
- CE Certified
- UL / MET / CSA Certification is available upon request, additional charges will apply
- Temperature controller is MET and CE Certified
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| Application notes |
Please read article: High efficiency CSS CdTe Solar Cell |
| Operation Instructions |
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| Warning |
- The tube furnaces with quartz tube are designed for using under vacuum and low pressure < 0.12 MPa (absolute pressure)
- Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C
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| Reference Articles |
- Please read article: High efficiency CSS CdTe Solar Cell
- UCLA researchers improve process for manufacturing highly efficient solar cells
- Planar Heterojunction Perovskite Solar Cells via Vapor-Assisted Solution Process
- Sub 150 °C Processed Meso-superstructured Perovskite Solar Cells with Enhanced Efficiency
- Best_Research-Cell_Efficiencies
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