Atmosphere Controlled Spin Coater ( 6K RPM & 6" wafer Max.) with Complete Accessories - VTC-200PV
VTC-200PV is an atmosphere-controllable spin coater with Polypropylene air tighten, which can make spin coating either under vacuum or inert gas atmosphere. The sample holder is included for coating wafer upto 6". The digital control box is separated from spin coater which allows you operate in the remote location. The spinning speed is variable from 500-6000 rpm with two programmable segments. The package includes the two-stage vacuum pump , digital vacuum gauge and 20ml
syringe for immediate use.
SPECIFICATIONS:
Structure
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- Case and the spin disk made of Polypropylene (PP) to resist most of the corrosive solutions.
- The digital control box is separated from spin coater.
- One two-stage vacuum pump is included in the standard package; please click here for specification details.
- The digital vacuum gauge is installed on the top cover of the spin coater
- One filter is included in standard package. It is used to connect the pump and coater for preventing wastewater from flowing into the pump.
- The sample can be held either by the mechanical fixture ( vacuum injection or vacuum ( for inert gas )
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| Input Power |
- Default 220VAC, 50/60Hz, single phase, 1000W Max.
- 110V is available in the optional bar ( with 1500W transformer )
- A power socket on the back of the Digital control box is used to supply power to the vacuum pump. (The output voltage of this power outlet depends on the input voltage of the spin coater, e.g. if the spin coater is plugged into AC 110V, this power socket will supply AC 110V.)
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| Chamber & Vacuum Chuck |
- Chamber diameter: 150 mm
- PP anti-corrosive chuck which can hold substrate up to 6" Dia. either by vacuum or by the mechanical fixture
- Vacuum chuck only can be used at inert gas atmosphere
- Mechanical chuck must be used for vacuum injection
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| Vacuum |
- One 156 L/m Double Stage Rotary Vane Vacuum Pump with Exhaust Filter is included in the standard package, please click the picture below for specification details. (Pic.1)
- Max. vacuum level for the system is 900 m-torr
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| Spin Speed |
- Digital control panel with six programmable segments of different spin times and speeds
- Maximum programmable spin time 6*60s = 360s
- 500 - 6000 RPM adjustable spinning speed at each segment
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Liquid Injecting
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- 20mL syringe is used to contain the coating material (Click Pic 1)
- Pic 1 |
Optional
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- Heating cover with digital temperature controller up to 120 ºC is available upon request at extra cost ($1950), which allow sample drying in-situ during and after coating (Click Pic 1 & 2)
- Pic 1 - Pic 2 |
| Motor |
24VDC, Brushless, 200W max.: |
Product Dimensions
( click picture right to see details) |
Coater: 250mm Dia x 590mm (H) Control Unit: 330mm(L) x 380mm(W) x 165mm (H) |
| Net Weight |
25 kg |
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