| Customization: | Available |
|---|---|
| Application: | Petroleum Processing Industry |
| Cleaning Media: | Wet Cleaning |
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| Input Power |
AC 220V, 50/60 Hz RF Power: 100 W Max. Vacuum Pump: < 500W Total Power: < 600W |
| RF Power | RF power (High voltage & high-frequency current applied on the coil) is adjustable at three levels: Low Setting 7.2W; Medium Setting 10.2W; High Setting 30W RF frequency: 13,56 MHz |
| Control Panel | Control Function: Clean time, RF Power, Vacuum Pump. |
| Plasma Chamber |
6" diameter x 6.5" length quartz chamber 3 Liter Capacity Hinged type door with viewing window for easy sample loading and observing |
| Vacuum Pump |
One Single Step Rotary Vane Vacuum Pump (220V,187 L/m ) with Exhaust filter and vacuum pipe are included for the equipment (220V). |
| Inert Gas | Many inert gases can be chosen for plasma cleaning such as N2, Ar, Air and Mixed gas depended on what kind material will be treated. ( not included in the package) No flammable gas shall be used for the plasma cleaner |
| Optional |
Combinations of PCE-6 plasma cleaner with Two Channel Gas Mixer will be a solution for introducing up to two process gases. Order plasma cleaner with the two-channel gas mixer from product options or Click the picture left for Two Channel Gas Mixer. If use 4" wafer quartz boat, the cleaner can treat 25 pcs 2" Dia wafer per load |
| Dimensions | 400mm L ×300mm W ×300mm H 16" x 12" x 12" (inch) |
| Net Weight | 30 Lbs |
| Shipping Weight & Dimensions | 140 lbs 40"x30"x23" |
| Warranty | One year limited warranty with lifetime support ( no warranty for Pyrex glass chamber ) |
| Application Note: | Positive Pressure may damage Plasma Quartz Chamber. |
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